![[ICO]](/icons/blank.gif){kind=icon}
![[PARENTDIR]](/icons/back.gif){kind=icon}
![[TXT]](/icons/text.gif){kind=icon}
![[ ]](/icons/unknown.gif){kind=icon}
| Name | Last modified | Size | Description |
|---|---|---|---|---|
| Parent Directory | - | ||
| Chamber.sh | 2022-02-25 16:24 | 15K | |
| Vacuum.sh | 2022-02-25 16:24 | 7.8K | |
| WorkingGas.sh | 2022-02-25 16:24 | 6.5K | |
| X_working_gas_discharge_request | 2022-02-25 16:24 | 2 | |
| p_chamber_pressure_before_discharge | 2022-02-25 16:24 | 4 | |
| p_chamber_pressure_predischarge | 2022-02-25 16:24 | 5 | |
| p_working_gas_discharge_request | 2022-02-25 16:24 | 3 | |